- AutorIn
- Kilian Stubbe
- Titel
- Development and Simulation Assessment of Semiconductor Production System Enhancements for Fast Cycle Times
- Zitierfähige Url:
- https://nbn-resolving.org/urn:nbn:de:bsz:14-qucosa-27343
- Datum der Einreichung
- 05.08.2009
- Datum der Verteidigung
- 29.01.2010
- Abstract (EN)
- Long cycle times in semiconductor manufacturing represent an increasing challenge for the industry and lead to a growing need of break-through approaches to reduce it. Small lot sizes and the conversion of batch processes to mini-batch or single-wafer processes are widely regarded as a promising means for a step-wise cycle time reduction. Our analysis with discrete-event simulation and queueing theory shows that small lot size and the replacement of batch tools with mini-batch or single wafer tools are beneficial but lot size reduction lacks persuasive effectiveness if reduced by more than half. Because the results are not completely convincing, we develop a new semiconductor tool type that further reduces cycle time by lot streaming leveraging the lot size reduction efforts. We show that this combined approach can lead to a cycle time reduction of more than 80%.
- Freie Schlagwörter (DE)
- Halbleiterfertigung, Simulation, Losgröße, Anlagentyp, Produktionssystem
- Freie Schlagwörter (EN)
- Manufacturing, Semiconductor, Simulation, Batch tools, Single-wafer tools, Lot size, Production system
- Klassifikation (DDC)
- 620
- Klassifikation (RVK)
- ZN 4100
- GutachterIn
- Prof. Dr. Oliver Rose
- Prof. Dr. Lars Mönch
- BetreuerIn
- Prof. Dr. Oliver Rose
- Den akademischen Grad verleihende / prüfende Institution
- Technische Universität Dresden, Dresden
- URN Qucosa
- urn:nbn:de:bsz:14-qucosa-27343
- Veröffentlichungsdatum Qucosa
- 08.03.2010
- Dokumenttyp
- Dissertation
- Sprache des Dokumentes
- Englisch
- Lizenz / Rechtehinweis