Modeling of optical and electrical properties of In2O3:Sn coatings made by various techniques

Abstract

The optical and electrical properties of two types of wet chemical processed tin doped indium oxide (ITO) films deposited by spin coating technique as well as of a commercial sputtered ITO film have been measured. The transmission and reflection spectra in the wavelength range 0.25 to 20 µm have been simulated using the Scout 2 software with different dielectric function models. The electrical parameters obtained from the modeling are compared with those obtained experimentally. The optical data of a low porosity (28%), low specific resistivity (? = 6.3