Circuit electromechanics with a non-metallized nanobeam

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Applied Physics Letters. 2014, 105(12), 123106. ISSN 0003-6951. eISSN 1077-3118. Available under: doi: 10.1063/1.4896419
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We have realized a nano-electromechanical hybrid system consisting of a silicon nitride beam dielectrically coupled to a superconducting microwave resonator. We characterize the sample by making use of the Duffing nonlinearity of the strongly driven beam. In particular, we calibrate the amplitude spectrum of the mechanical motion and determine the electromechanical vacuum coupling. A high quality factor of 480 000 at a resonance frequency of 14 MHz is achieved at 0.5 K. The experimentally determined electromechanical vacuum coupling of 11.5 mHz is quantitatively compared with finite element based model calculations.

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ISO 690PERNPEINTNER, Matthias, Thomas FAUST, Fredrik HOCKE, Jörg P. KOTTHAUS, Eva M. WEIG, Hans HUEBL, Rudolf GROSS, 2014. Circuit electromechanics with a non-metallized nanobeam. In: Applied Physics Letters. 2014, 105(12), 123106. ISSN 0003-6951. eISSN 1077-3118. Available under: doi: 10.1063/1.4896419
BibTex
@article{Pernpeintner2014Circu-29062,
  year={2014},
  doi={10.1063/1.4896419},
  title={Circuit electromechanics with a non-metallized nanobeam},
  number={12},
  volume={105},
  issn={0003-6951},
  journal={Applied Physics Letters},
  author={Pernpeintner, Matthias and Faust, Thomas and Hocke, Fredrik and Kotthaus, Jörg P. and Weig, Eva M. and Huebl, Hans and Gross, Rudolf},
  note={Article Number: 123106}
}
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