Time-resolved detection of propagating Lamb waves in thin silicon membranes with frequencies up to 197 GHz

Guided acoustic waves are generated in nanopatterned silicon membranes with aluminum gratings by optical excitation with a femtosecond laser. The spatial modulation of the photoacoustic excitation leads to Lamb waves with wavelengths determined by the grating period. The excited Lamb waves are optically detected for different grating periods and at distances up to several μm between pump and probe spot. The measured frequencies are compared to the theoretical dispersion relation for Lamb waves in thin silicon membranes. Compared to surface acoustic waves in bulk silicon twice higher frequencies for Lamb waves (197 GHz with a 100 nm grating) are generated in a membrane at equal grating periods.

Fachgebiet (DDC)

530 Physik

Schlagwörter

Diffraction Gratings, Surface acoustic Waves, acoustic sensing, dispersion relations,

Zitieren

ISO 690

GROSSMANN, Martin, Oliver RISTOW, Mike HETTICH, Chuan HE, Reimar WAITZ, Elke SCHEER, Vitalyi GUSEV, Thomas DEKORSY, Martin SCHUBERT, 2015. Time-resolved detection of propagating Lamb waves in thin silicon membranes with frequencies up to 197 GHz. In: Applied Physics Letters. 2015, 106(17), 171904. ISSN 0003-6951. eISSN 1077-3118. Available under: doi: 10.1063/1.4919132

BibTex

@article{Grossmann2015Timer-30836,
  year={2015},
  doi={10.1063/1.4919132},
  title={Time-resolved detection of propagating Lamb waves in thin silicon membranes with frequencies up to 197 GHz},
  number={17},
  volume={106},
  issn={0003-6951},
  journal={Applied Physics Letters},
  author={Grossmann, Martin and Ristow, Oliver and Hettich, Mike and He, Chuan and Waitz, Reimar and Scheer, Elke and Gusev, Vitalyi and Dekorsy, Thomas and Schubert, Martin},
  note={Article Number: 171904}
}

RDF

<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/30836">
    <dc:creator>Dekorsy, Thomas</dc:creator>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2015-04-29T09:36:40Z</dcterms:available>
    <dc:contributor>Hettich, Mike</dc:contributor>
    <dc:contributor>Scheer, Elke</dc:contributor>
    <dcterms:title>Time-resolved detection of propagating Lamb waves in thin silicon membranes with frequencies up to 197 GHz</dcterms:title>
    <dc:creator>Hettich, Mike</dc:creator>
    <dc:contributor>He, Chuan</dc:contributor>
    <dc:creator>Scheer, Elke</dc:creator>
    <dc:creator>Schubert, Martin</dc:creator>
    <dc:contributor>Waitz, Reimar</dc:contributor>
    <dc:language>eng</dc:language>
    <dc:contributor>Schubert, Martin</dc:contributor>
    <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/30836"/>
    <dcterms:issued>2015</dcterms:issued>
    <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/30836/3/Grossmann_0-288114.pdf"/>
    <dc:creator>Waitz, Reimar</dc:creator>
    <dc:creator>Gusev, Vitalyi</dc:creator>
    <dc:creator>Grossmann, Martin</dc:creator>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dc:contributor>Gusev, Vitalyi</dc:contributor>
    <dcterms:rights rdf:resource="https://rightsstatements.org/page/InC/1.0/"/>
    <dc:creator>Ristow, Oliver</dc:creator>
    <dc:contributor>Ristow, Oliver</dc:contributor>
    <dc:creator>He, Chuan</dc:creator>
    <dcterms:abstract xml:lang="eng">Guided acoustic waves are generated in nanopatterned silicon membranes with aluminum gratings by optical excitation with a femtosecond laser. The spatial modulation of the photoacoustic excitation leads to Lamb waves with wavelengths determined by the grating period. The excited Lamb waves are optically detected for different grating periods and at distances up to several μm between pump and probe spot. The measured frequencies are compared to the theoretical dispersion relation for Lamb waves in thin silicon membranes. Compared to surface acoustic waves in bulk silicon twice higher frequencies for Lamb waves (197 GHz with a 100 nm grating) are generated in a membrane at equal grating periods.</dcterms:abstract>
    <dc:contributor>Grossmann, Martin</dc:contributor>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/30836/3/Grossmann_0-288114.pdf"/>
    <dc:contributor>Dekorsy, Thomas</dc:contributor>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2015-04-29T09:36:40Z</dc:date>
    <dc:rights>terms-of-use</dc:rights>
  </rdf:Description>
</rdf:RDF>

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