Stacked PECVD backside dielectrics : an option for a firing stable passivation of industrial type screen-printed silicon solar cells
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On the way to higher efficiencies and reduced costs material quality has to increase while wafer thickness decreases. With industrial screen-printed Cz solar cells reaching above 19% efficiency [1] the wellestablished Al-BSF is a limiting factor for further improvement. Simple and cost effective to deposit dielectrics with good characteristics for backside passivation have to be found. Our approach is a multilayer stack-system consisting of amorphous silicon carbide (SiCx), silicon oxide (SiO2) and silicon nitride (SiNx). This system enables us to achieve a low surface recombination velocity of 7.6 cm/s although a transparent SiCx layer with high carbon content (CH4/SiH4 flow rate of 8) is used. SiCx passivates n- and p-doped silicon at high deposition rates and low deposition temperatures. The cross compatibility of the used dielectrics enables us to deposit the stack system within one deposition step.
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JOOS, Sebastian, Uwe HESS, Sven SEREN, Barbara TERHEIDEN, Giso HAHN, 2010. Stacked PECVD backside dielectrics : an option for a firing stable passivation of industrial type screen-printed silicon solar cells. 25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion. Valencia, Spain, 6. Sep. 2010 - 10. Sep. 2010. In: DE SANTI, G.F., ed., H. OSSENBRINK, ed., P. HELM, ed.. 25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion. Munich, Germany: WIP-Renewable Energies, 2010, pp. 1875-1878. Available under: doi: 10.4229/25thEUPVSEC2010-2CV.2.48BibTex
@inproceedings{Joos2010Stack-16009, year={2010}, doi={10.4229/25thEUPVSEC2010-2CV.2.48}, title={Stacked PECVD backside dielectrics : an option for a firing stable passivation of industrial type screen-printed silicon solar cells}, publisher={WIP-Renewable Energies}, address={Munich, Germany}, booktitle={25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion}, pages={1875--1878}, editor={de Santi, G.F. and Ossenbrink, H. and Helm, P.}, author={Joos, Sebastian and Heß, Uwe and Seren, Sven and Terheiden, Barbara and Hahn, Giso} }
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