Progress in hydrogenation of multicrystalline silicon solar cells

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2006
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Kaes, Martin
Metz, Axel
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POORTMANS, Jozef, ed. and others. Twentyfirst European Photovoltaic Solar Energy Conference : Proceedings of the International Conference. Munich: WIP-Renewable Energies, 2006, pp. 679-683. ISBN 978-1-60423-787-0
Zusammenfassung

We focus on hydrogenation by firing a double sided PECVD SiN on EFG and block cast mc wafers. Compared to our standard high-efficiency process with a PECVD SiN on the front side and a full area Al-BSF on the rear side we replaced the full rear side Al-BSF by a SiO/SiN stack with a locally alloyed Al-BSF. In contrast to the local firing at the laser fired contacts approach, the whole wafer is heated to release hydrogen from the SiN into the bulk from both sides alloying the Al locally at the rear side. This double sided hydrogenation gives a better bulk passivation compared to the standard single sided hydrogenation. Especially areas of lower quality improve by the double sided hydrogenation, made visible by LBIC measurements. With this contribution we try to give new insights to the wide field of hydrogenation.

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Fachgebiet (DDC)
530 Physik
Schlagwörter
Hydrogen Passivation, Recombination, Multi-Crystalline
Konferenz
21st European Photovoltaic Solar Energy Conference : 21th EC PVSEC, 4. Sep. 2006 - 8. Sep. 2006, Dresden, Germany
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Zitieren
ISO 690KAES, Martin, Giso HAHN, Axel METZ, 2006. Progress in hydrogenation of multicrystalline silicon solar cells. 21st European Photovoltaic Solar Energy Conference : 21th EC PVSEC. Dresden, Germany, 4. Sep. 2006 - 8. Sep. 2006. In: POORTMANS, Jozef, ed. and others. Twentyfirst European Photovoltaic Solar Energy Conference : Proceedings of the International Conference. Munich: WIP-Renewable Energies, 2006, pp. 679-683. ISBN 978-1-60423-787-0
BibTex
@inproceedings{Kaes2006Progr-42209,
  year={2006},
  title={Progress in hydrogenation of multicrystalline silicon solar cells},
  isbn={978-1-60423-787-0},
  publisher={WIP-Renewable Energies},
  address={Munich},
  booktitle={Twentyfirst European Photovoltaic Solar Energy Conference : Proceedings of the International Conference},
  pages={679--683},
  editor={Poortmans, Jozef},
  author={Kaes, Martin and Hahn, Giso and Metz, Axel},
  note={Auf CD-ROM}
}
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    <dcterms:abstract xml:lang="eng">We focus on hydrogenation by firing a double sided PECVD SiN on EFG and block cast mc wafers. Compared to our standard high-efficiency process with a PECVD SiN on the front side and a full area Al-BSF on the rear side we replaced the full rear side Al-BSF by a SiO/SiN stack with a locally alloyed Al-BSF. In contrast to the local firing at the laser fired contacts approach, the whole wafer is heated to release hydrogen from the SiN into the bulk from both sides alloying the Al locally at the rear side. This double sided hydrogenation gives a better bulk passivation compared to the standard single sided hydrogenation. Especially areas of lower quality improve by the double sided hydrogenation, made visible by LBIC measurements. With this contribution we try to give new insights to the wide field of hydrogenation.</dcterms:abstract>
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