Laser doping from as-deposited CVD layers for high-efficiency crystalline silicon solar cells

Engelhardt, Josh; Kromer, Hermann; Hahn, Giso; Terheiden, Barbara

Laser doping from as-deposited CVD layers for high-efficiency crystalline silicon solar cells

Dateien

Engelhardt_2-1pkzyauhtmsdw4.pdfGröße: 1.61 MBDownloads: 231

Datum

2019

Open Access-Veröffentlichung

Open Access Green

Sammlungen

Physik

Publikationstyp

Beitrag zu einem Konferenzband

Publikationsstatus

Published

Erschienen in

POORTMANS, Jef, ed. and others. SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium. Melville, New York: AIP Publishing, 2019, 070002. AIP Conference Proceedings. 2147,1. eISSN 0094-243X. ISBN 978-0-7354-1892-9. Available under: doi: 10.1063/1.5123863

Zusammenfassung

Laser doping from as-deposited CVD layers is a new and promising field for selective doping in solar cell processing. It allows for freely structured and adaptive doping with high-throughput. Challenging is the optimization of a variety of process parameters. In this work, we demonstrate the impact of laser parameters, such as fluence and sweep repetition, as well as thermal treatment i.e., tube diffusion, on passivation quality. Specifically, laser doping process dependence on the resulting doping profile and on iV_OC level is investigated. Laser processing of solar cell precursors with a selective emitter and local BSF is shown to reach an iV_OC of ∼700 mV allowing for a high-efficiency level of >22.5% in industrial processing. The process flow in this case is suitable for a low-cost approach with reduced number of process steps.

Fachgebiet (DDC)

530 Physik

Konferenz

SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics, 8. Apr. 2019 - 10. Apr. 2019, Leuven, Belgium

Zitieren

ISO 690

ENGELHARDT, Josh, Hermann KROMER, Giso HAHN, Barbara TERHEIDEN, 2019. Laser doping from as-deposited CVD layers for high-efficiency crystalline silicon solar cells. SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics. Leuven, Belgium, 8. Apr. 2019 - 10. Apr. 2019. In: POORTMANS, Jef, ed. and others. SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium. Melville, New York: AIP Publishing, 2019, 070002. AIP Conference Proceedings. 2147,1. eISSN 0094-243X. ISBN 978-0-7354-1892-9. Available under: doi: 10.1063/1.5123863

BibTex

@inproceedings{Engelhardt2019Laser-46823,
  year={2019},
  doi={10.1063/1.5123863},
  title={Laser doping from as-deposited CVD layers for high-efficiency crystalline silicon solar cells},
  number={2147,1},
  isbn={978-0-7354-1892-9},
  publisher={AIP Publishing},
  address={Melville, New York},
  series={AIP Conference Proceedings},
  booktitle={SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium},
  editor={Poortmans, Jef},
  author={Engelhardt, Josh and Kromer, Hermann and Hahn, Giso and Terheiden, Barbara},
  note={Article Number: 070002}
}

RDF

<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/46823">
    <dc:creator>Terheiden, Barbara</dc:creator>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dcterms:issued>2019</dcterms:issued>
    <dc:creator>Engelhardt, Josh</dc:creator>
    <dc:creator>Hahn, Giso</dc:creator>
    <bibo:uri rdf:resource="https://kops.uni-konstanz.de/handle/123456789/46823"/>
    <dcterms:rights rdf:resource="https://rightsstatements.org/page/InC/1.0/"/>
    <dc:creator>Kromer, Hermann</dc:creator>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:contributor>Kromer, Hermann</dc:contributor>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dcterms:abstract xml:lang="eng">Laser doping from as-deposited CVD layers is a new and promising field for selective doping in solar cell processing. It allows for freely structured and adaptive doping with high-throughput. Challenging is the optimization of a variety of process parameters. In this work, we demonstrate the impact of laser parameters, such as fluence and sweep repetition, as well as thermal treatment i.e., tube diffusion, on passivation quality. Specifically, laser doping process dependence on the resulting doping profile and on iV&lt;sub&gt;OC&lt;/sub&gt; level is investigated. Laser processing of solar cell precursors with a selective emitter and local BSF is shown to reach an iV&lt;sub&gt;OC&lt;/sub&gt; of ∼700 mV allowing for a high-efficiency level of &gt;22.5% in industrial processing. The process flow in this case is suitable for a low-cost approach with reduced number of process steps.</dcterms:abstract>
    <dc:rights>terms-of-use</dc:rights>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2019-09-11T12:39:56Z</dcterms:available>
    <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/46823/1/Engelhardt_2-1pkzyauhtmsdw4.pdf"/>
    <dcterms:title>Laser doping from as-deposited CVD layers for high-efficiency crystalline silicon solar cells</dcterms:title>
    <dc:language>eng</dc:language>
    <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/46823/1/Engelhardt_2-1pkzyauhtmsdw4.pdf"/>
    <dc:contributor>Engelhardt, Josh</dc:contributor>
    <dc:contributor>Hahn, Giso</dc:contributor>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2019-09-11T12:39:56Z</dc:date>
    <dc:contributor>Terheiden, Barbara</dc:contributor>
  </rdf:Description>
</rdf:RDF>

Universitätsbibliographie

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