Correlation of stress in silicon nitride layers with their complete removal by laser ablation

Engelhardt, Josh; Ohl, Sybille; Hahn, Giso; Terheiden, Barbara

Correlation of stress in silicon nitride layers with their complete removal by laser ablation

Dateien

Engelhardt_250241.pdfGröße: 655.86 KBDownloads: 264

Datum

2013

Open Access-Veröffentlichung

Open Access Gold

Sammlungen

Physik

Publikationstyp

Zeitschriftenartikel

Publikationsstatus

Published

Erschienen in

Energy Procedia. 2013, 38, pp. 707-712. ISSN 1876-6102. eISSN 1876-6102. Available under: doi: 10.1016/j.egypro.2013.07.336

Zusammenfassung

In recent years laser ablation of dielectric layers for local structuring of solar cell passivation layers has become more and more common. Apart from adjusting laser parameters for a damage-free removal of dielectric layers, it is necessary to prepare the surface in a way suitable for the respective contact methods (screen printing, nickel plating, etc.). In this study, we demonstrate for silicon nitride layers how the deposition parameters and deposition method correlate to the characteristics of the ablated area. Furthermore a simple method to predict these characteristics is introduced based on the determination of the intrinsic stress in the dielectric layer. A correlation between compressively stressed or stress-free silicon nitride layers and a complete ablation was found.

Fachgebiet (DDC)

530 Physik

Schlagwörter

ablation, laser, stress, silicon nitride

Zitieren

ISO 690

ENGELHARDT, Josh, Sybille OHL, Giso HAHN, Barbara TERHEIDEN, 2013. Correlation of stress in silicon nitride layers with their complete removal by laser ablation. In: Energy Procedia. 2013, 38, pp. 707-712. ISSN 1876-6102. eISSN 1876-6102. Available under: doi: 10.1016/j.egypro.2013.07.336

BibTex

@article{Engelhardt2013Corre-25024,
  year={2013},
  doi={10.1016/j.egypro.2013.07.336},
  title={Correlation of stress in silicon nitride layers with their complete removal by laser ablation},
  volume={38},
  issn={1876-6102},
  journal={Energy Procedia},
  pages={707--712},
  author={Engelhardt, Josh and Ohl, Sybille and Hahn, Giso and Terheiden, Barbara}
}

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