- AutorIn
- Daisuke Yamane
- Toshifumi Konishi
- Minami Teranishi
- Tso-Fu Mark Chang
- Chun-Yi Chen
- Hiroshi Toshiyoshi
- Kazuya Masu
- Masato Sone
- Katsuyuki Machida
- Titel
- A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology
- Zitierfähige Url:
- https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa-207232
- Quellenangabe
- AMC 2015 – Advanced Metallization Conference
- Quellenangabe
- AMC 2015 – Advanced Metallization Conference
- Abstract (EN)
- This paper reports the evaluation results of the mechanical structures of MEMS (micro electro mechanical systems) sensor implemented in the integrated MEMS inertial sensor for a wide sensing range from below 0.1 G to 20 G (1 G = 9.8 m/s^2). To investigate the mechanical tolerance, a maximum target acceleration of 20G was applied to the sub-1G sensor which had the heaviest proof mass of all that sensors had. The structure stability of Ti/Au multi-layered structures was also examined by using Ti/Au micro cantilevers. The results showed that the stoppers effectively functioned to prevent the proof mass and the springs from self-destruction, and that the stability of Ti/Au structures increased with an increase in width. Those results suggest that the proposed stopper and spring structures could be promising to realize MEMS sensors.
- Freie Schlagwörter (EN)
- MEMS, accelerometer, Au electroplating, multi-layer metal, cantilever
- Klassifikation (DDC)
- 620
- Normschlagwörter (GND)
- MEMS, Beschleunigungsmesser, Kantilever, Sensor
- Publizierende Institution
- Technische Universität Chemnitz, Chemnitz
- URN Qucosa
- urn:nbn:de:bsz:ch1-qucosa-207232
- Veröffentlichungsdatum Qucosa
- 22.07.2016
- Dokumenttyp
- Konferenzbeitrag
- Sprache des Dokumentes
- Englisch