- AutorIn
- Peter Frenzel Technische Universität Chemnitz
- Andrea PreußTechnische Universität Chemnitz
- Jörn BankwitzFraunhofer Institute for Electronic Nano Systems (ENAS)
- Colin Georgi
- Fabian Ganss
- Lutz Mertens
- Stefan E. Schulz
- Olav Hellwig
- Michael Mehring
- Heinrich Lang
- Titel
- Synthesis of Mg and Zn diolates and their use in metal oxide deposition
- Zitierfähige Url:
- https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa2-337226
- Quellenangabe
- RSC Advances Verlag: RSC
Erscheinungsjahr: 2019
Auflage: 9
Seiten: 10657-10669
E-ISSN: 2046-2069
DOI: 10.1039/C9RA00585D - Erstveröffentlichung
- 2019
- Abstract (EN)
- The synthesis of complexes [M(OCHMeCH2NMeCH2)2] (5, M = Mg; 7, M = Zn) is described. Treatment of MeHNCH2CH2NMeH (1) with 2-methyloxirane (2) gave diol (HOCHMeCH2NMeCH2)2 (3), which upon reaction with equimolar amounts of MR2 (4, M = Mg, R = Bu; 6, M = Zn, R = Et) gave 5 and 7. The thermal behavior and vapor pressure of 5 and 7 were investigated to show whether they are suited as CVD (= chemical vapor deposition) and/or spin-coating precursors for MgO or ZnO layer formation. Thermogravimetric (TG) studies revealed that 5 and 7 decompose between 80–530 °C forming MgO and ZnO as evidenced by PXRD studies. In addition, TG-MS-coupled experiments were carried out with 7 proving that decomposition occurs by M–O, C–O, C–N and C–C bond cleavages, as evidenced from the detection of fragments such as CH4N+, C2H4N+, C2H5N+, CH2O+, C2H2O+ and C2H3O+. The vapor pressure of 7 was measured at 10.4 mbar at 160 °C, while 5 is non-volatile. The layers obtained by CVD are dense and conformal with a somewhat granulated surface morphology as evidenced by SEM studies. In addition, spin–coating experiments using 5 and 7 as precursors were applied. The corresponding MO layer thicknesses are between 7–140 nm (CVD) or 80 nm and 65 nm (5, 7; spin-coating). EDX and XPS measurements confirm the formation of MgO and ZnO films, however, containing 12–24 mol% (CVD) or 5–9 mol% (spin-coating) carbon. GIXRD studies verify the crystalline character of the deposited layers obtained by CVD and the spin-coating processes.
- Andere Ausgabe
- DOI: 10.1039/C9RA00585D
- Freie Schlagwörter (DE)
- Magnesiumoxid, Zinkoxid, Rotationsbeschichtung, Chemische Gasphasenabscheidung, Dampfdruck, Thermische Zersetzung, Technische Universität Chemnitz, Publikationsfonds
- Freie Schlagwörter (EN)
- Magnesium Oxide, Zinc Oxide, Spin-Coating, Chemical Vapor Deposition, Vapor Pressure, Thermal Decomposition, Chemnitz University of Technology, Publication funds
- Klassifikation (DDC)
- 546
- Normschlagwörter (GND)
- Chemie, Molekül
- Verlag
- Royal Society of Chemistry, Großbritannien
- Version / Begutachtungsstatus
- publizierte Version / Verlagsversion
- URN Qucosa
- urn:nbn:de:bsz:ch1-qucosa2-337226
- Veröffentlichungsdatum Qucosa
- 08.04.2019
- Dokumenttyp
- Artikel
- Sprache des Dokumentes
- Englisch