Universität zu Köln

Singh, Trilok ORCID: 0000-0003-2322-7403, Lehnen, Thomas, Leuning, Tessa, Sahu, Diptiranjan and Mathur, Sanjay (2014). Thickness dependence of optoelectronic properties in ALD grown ZnO thin films. Appl. Surf. Sci., 289. S. 27 - 33. AMSTERDAM: ELSEVIER. ISSN 1873-5584

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Abstract

ZnO thin films with high conductivity and high transparency were grown on Si (1 0 0) substrates by atomic layer deposition. Thickness dependent (43-225 nm) changes in crystallographic, optical and electrical properties are reported and discussed. Increase in film thickness caused a decrease in the bandgap by relaxation of stress in the plane of the film and led to an improvement in crystallinity and conductivity. The optical studies showed a noticeable change towards the contribution of excitonic and phonon replica to the UV-emission band. (C) 2013 Elsevier B.V. All rights reserved.

Item Type:	Journal Article
Creators:	Creators Email ORCID ORCID Put Code Singh, Trilok UNSPECIFIED orcid.org/0000-0003-2322-7403 UNSPECIFIED Lehnen, Thomas UNSPECIFIED UNSPECIFIED UNSPECIFIED Leuning, Tessa UNSPECIFIED UNSPECIFIED UNSPECIFIED Sahu, Diptiranjan UNSPECIFIED UNSPECIFIED UNSPECIFIED Mathur, Sanjay UNSPECIFIED UNSPECIFIED UNSPECIFIED
URN:	urn:nbn:de:hbz:38-448504
DOI:	10.1016/j.apsusc.2013.10.071
Journal or Publication Title:	Appl. Surf. Sci.
Volume:	289
Page Range:	S. 27 - 33
Date:	2014
Publisher:	ELSEVIER
Place of Publication:	AMSTERDAM
ISSN:	1873-5584
Language:	English
Faculty:	Faculty of Mathematics and Natural Sciences
Divisions:	Faculty of Mathematics and Natural Sciences > Department of Chemistry > Institute of Inorganic Chemistry
Subjects:	no entry
Uncontrolled Keywords:	Keywords Language ATOMIC LAYER DEPOSITION; OPTICAL-PROPERTIES; SURFACE-CHEMISTRY; METALLIC ZN; ZINC-OXIDE; TEMPERATURE; STRAIN; SEMICONDUCTORS; NANOPARTICLES; SUBSTRATE Multiple languages Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter Multiple languages
Refereed:	Yes
URI:	http://kups.ub.uni-koeln.de/id/eprint/44850