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Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components

Giere, A. ; Schafranek, Robert ; Zheng, Yuliang ; Maune, Holger ; Sazegar, Mohsen ; Jakoby, Rolf ; Klein, Anja (2020)
Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components.
In: Frequenz, 2008, 62 (3-4)
doi: 10.25534/tuprints-00013399
Article, Secondary publication, Publisher's Version

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Item Type: Article
Type of entry: Secondary publication
Title: Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components
Language: English
Date: 30 November 2020
Place of Publication: Darmstadt
Year of primary publication: 2008
Publisher: De Gruyter
Journal or Publication Title: Frequenz
Volume of the journal: 62
Issue Number: 3-4
DOI: 10.25534/tuprints-00013399
Corresponding Links:
Origin: Secondary publication service
Abstract:

In this paper we present the impact of acoustic resonances excited by electrostriction in BST thin-films on the Q-factor of a varactor in the GHz range. By changing the process-parameter substrate to target distance while sputtering the thin-films, we observe a change in the acoustic resonance frequencies. To characterize the material properties which determine the acoustic resonance frequencies a model based on a 1D acoustic transmission line is used. The extracted material properties results in a proportional dependency to the changed process parameter. For verification of the acoustic transmission line model 3D simulations have been performed which show good agreement to the line model for lower resonance frequencies, where the difference at higher frequencies becomes significant due to additional higher order modes.

Status: Publisher's Version
URN: urn:nbn:de:tuda-tuprints-133993
Classification DDC: 600 Technology, medicine, applied sciences > 600 Technology
600 Technology, medicine, applied sciences > 620 Engineering and machine engineering
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Surface Science
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) > Microwave Engineering
Date Deposited: 30 Nov 2020 13:55
Last Modified: 29 Sep 2023 09:29
URI: https://tuprints.ulb.tu-darmstadt.de/id/eprint/13399
PPN: 50209009X
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