Annealing effects on SiOxNy thin films : Optical and morphological properties

Perani, Martina; Brinkmann, Nils H.; Fazio, Maria Antonietta; Hammud, A.; Terheiden, Barbara; Cavalcoli, Daniela

Annealing effects on SiOxNy thin films : Optical and morphological properties

Dateien

Perani_2-1pbxtu3vhdcy31.pdfGröße: 1.27 MBDownloads: 338

Datum

2016

Autor:innen

Perani, Martina

Brinkmann, Nils H.

Fazio, Maria Antonietta

Hammud, A.

Terheiden, Barbara

Cavalcoli, Daniela

Open Access-Veröffentlichung

Open Access Green

Sammlungen

Physik

Publikationstyp

Zeitschriftenartikel

Publikationsstatus

Published

Erschienen in

Thin Solid Films. 2016, 617, pp. 133-137. ISSN 0040-6090. eISSN 1879-2731. Available under: doi: 10.1016/j.tsf.2016.03.067

Zusammenfassung

The annealing effect on the properties of silicon oxynitride (SiO_xN_y) thin films has been investigated. The present contribution aims to study the structural and optical properties of SiO_xN_y thin films deposited by plasma enhanced chemical vapor deposition in view of their application in the field of photovoltaics. Evolution of the surface morphology and increase of the optical band gap with the thermal treatment have been determined and discussed in view of the application of the film as an emitter layer in heterojunction solar cells.

Fachgebiet (DDC)

530 Physik

Schlagwörter

Silicon oxy-nitride; Atomic force microscopy; Tauc gap; Optical properties; Height–height correlation function; Image segmentation

Zitieren

ISO 690

PERANI, Martina, Nils H. BRINKMANN, Maria Antonietta FAZIO, A. HAMMUD, Barbara TERHEIDEN, Daniela CAVALCOLI, 2016. Annealing effects on SiOxNy thin films : Optical and morphological properties. In: Thin Solid Films. 2016, 617, pp. 133-137. ISSN 0040-6090. eISSN 1879-2731. Available under: doi: 10.1016/j.tsf.2016.03.067

BibTex

@article{Perani2016Annea-37789,
  year={2016},
  doi={10.1016/j.tsf.2016.03.067},
  title={Annealing effects on SiOxNy thin films : Optical and morphological properties},
  volume={617},
  issn={0040-6090},
  journal={Thin Solid Films},
  pages={133--137},
  author={Perani, Martina and Brinkmann, Nils H. and Fazio, Maria Antonietta and Hammud, A. and Terheiden, Barbara and Cavalcoli, Daniela}
}

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